Beam Technologies for Integrated Processing

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components.

This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.

Table of Contents

• FRONT MATTER
• 1 INTRODUCTION
• 2 SUMMARY AND RECOMMENDATIONS
• 3 BEAM TECHNOLOGIES
• 4 BEAM APPLICATIONS IN MICROELECTRONICS
• 5 BEAM APPLICATIONS IN ENGINEERED MATERIALS
• 6 INTEGRATED PROCESSING
• 7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION
• APPENDIX A: ACRONYMS AND ABBREVIATIONS
• APPENDIX B: BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS
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