EUV Lithography
Format:Hardback
Publisher:John Wiley & Sons Inc
Published:16th Jan '09
Currently unavailable, and unfortunately no date known when it will be back
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
ISBN: 9780470471555
Dimensions: 254mm x 178mm x 43mm
Weight: 1542g
704 pages